Precise process control is achieved through the combination of ultra-stable, highly accurate mass flow meter sensors, fast-responding flow control valves and powerful digital electronics.

A mass flow controller (MFC) is a device used to measure and control the flow of liquids and gases. [1] A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a …

What is a mass flow controller? A mass flow controller precisely controls the flow rate of gas or liquid within a system. Acting as a regulator, an MFC ensures that the correct amount of gas or liquid flows …

MKS offers a comprehensive portfolio of high-performance Mass Flow Controllers (MFCs) designed to deliver exceptional precision and reliability in regulating gas flow rates.

Highly precise digital mass flow controllers for: vacuum, low pressure drop, unknown gases, bi-directional flow, ATEX Class 1 Zone 0, and others.

Sep 9, 2025 · What Is a Mass Flow Controller? A Mass Flow Controller (MFC) is a fluid control device designed to measure and regulate flow by mass, not just volume. Unlike traditional mass flow …

A mass flow controller (MFC) is a closed-loop device that sets, measures, and controls the flow of a particular gas or liquid. These devices are essential to most thermal and dry etching processes. …

A mass flow controller automatically controls the flow rate of a gas according to a set flow rate sent as an electric signal, without being affected by use conditions or changes in gas pressure.

A mass flow controllers produces repeatable results by automatically adjusting demand when line pressure changes due to other processes happening upstream from your device.

May 29, 2025 · Mass flow controllers operate in a closed control loop: They continuously regulate the current mass flow and precisely adjust the valve to keep the desired setpoint constant. A throttle …