Why does the polysilicon gate etch process require high polysil... | Filo
Why does the polysilicon gate etch process require high polysil... | Filo
8 months ago
askfilo.com
A multiple-step etch process is required for etching a polysilicon gate with thin gate oxide. How do you design an etch process that has no micromasking, has an anisotropic etch profile, and is selective to thin gate oxide? | Numerade
A multiple-step etch process is required for etching a polysilicon …
Apr 26, 2024
numerade.com
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